Effects of laser fluence on the structural properties of pulsed laser deposited ruthenium thin films |
| |
Authors: | Wai-Keat Lee Hin-Yong Wong Kah-Yoong Chan Thian-Khok Yong Seong-Shan Yap Teck-Yong Tou |
| |
Institution: | 1. Centre for Advanced Devices and Systems (CADS), Faculty of Engineering, Multimedia University, 63100, Cyberjaya, Selangor, Malaysia 2. Faculty of Engineering and Science, Universiti Tunku Abdul Rahman, 53300, Setapak, Kuala Lumpur, Malaysia 3. Institute of Physics, Norwegian University of Science & Technology, 7491, Trondheim, Norway
|
| |
Abstract: | Ruthenium (Ru) has received great interest in recent years for applications in microelectronics. Pulsed laser deposition (PLD)
enables the growth of Ru thin films at low temperatures. In this paper, we report for the first time the characterization
of pulsed laser deposited Ru thin films. The deposition processes were carried out at room temperature in vacuum environment
for different durations with a pulsed Nd:YAG laser of 355-nm laser wavelength, employing various laser fluences ranging from
2 J/cm2 to 8 J/cm2. The effect of the laser fluence on the structural properties of the deposited Ru films was investigated using surface profilometry,
scanning electron microscopy (SEM), and X-ray diffraction (XRD). Ru droplets, some spherical in shape and some flattened into
round discs were found on the deposited Ru. The droplets were correlated to ripple formations on the target during the laser-induced
ejection from the target. In addition, crystalline Ru with orientations of (100), (101), and (002) was observed in the XRD
spectra and their intensities were found to increase with increasing laser fluence and film thickness. Grain sizes ranging
from 20 nm to 35 nm were deduced using the Scherrer formula. Optical emission spectroscopy (OES) and energy-dispersive X-ray
spectroscopy (EDS) show that the composition of the plume and the deposited Ru film was of high purity. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|