High-efficiency guided-mode resonance filter

A high-efficiency guided-mode resonance reflection filter is reported. The device consists of a surface-relief photoresist grating and an underlying HfO (2) waveguide layer deposited on a fused-silica substrate. The spectral response measured with a dye-laser beam at normal incidence exhibited a peak reflectance of 98% at a wavelength of 860 nm with sideband reflectance below ~5% extending over the wavelength range provided by the dye (800-900 nm). At normal incidence the filter linewidth was 2.2 nm. High-efficiency double-peak resonances occurred at nonnormal incidence, with the spectral locations of the maxima vayring with the incidence angle. The filter response at various angles of incidence agreed well with the theoretically calculated reflectance curves.