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Photoluminescence and lasing properties of InAs/GaAs quantum dots grown by metal-organic chemical vapour deposition
Authors:Liang Song  Zhu Hong-Liang  Pan Jiao-Qing  Zhao Ling-Juan  Wang Lu-Feng  Zhou Fan  Shu Hui-Yun  Bian Jing  An Xin  Wang Wei
Affiliation:Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors, Chinese Academy of Sciences, Beijing100083,China
Abstract:Photoluminescence (PL) and lasing properties of InAs/GaAs quantumdots (QDs) with different growth procedures prepared by metalorganicchemical vapour deposition are studied. PL measurements show thatthe low growth rate QD sample has a larger PL intensity and anarrower PL line width than the high growth rate sample. Duringrapid thermal annealing, however, the low growth rate sample shows agreater blueshift of PL peak wavelength. This is caused by thelarger InAs layer thickness which results from the larger 2--3 dimensionaltransition critical layer thickness forthe QDs in the low-growth-rate sample. A growth technique includinggrowth interruption and in-situ annealing, named {indium flushmethod,} is used during the growth of GaAs cap layer, which canflatten the GaAs surface effectively. Though the method results in ablueshift of PL peak wavelength and a broadening of PL line width,it is essential for the fabrication of room temperature working QDlasers.
Keywords:metal-organic chemical vapourdeposition   InAs/GaAs quantum dots   laser
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