| 浅谈集成电路的废气处理 |
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| 引用本文： | 朱海英,黄其煜.浅谈集成电路的废气处理[J].洁净与空调技术,2008(2). |
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| 作者姓名： | 朱海英 黄其煜 |
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| 作者单位： | 上海交通大学微电子学院 |
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| 摘 要： | 集成电路的工业废气有含氟化物、硫酸雾的酸性废气,含氨的碱性废气,含异丙醇、光刻胶的有机废气,含SiO_2的含尘废气,以及含硅烷、磷烷的工艺尾气等,这些工业废气中大部分成分是有毒有害的,必须进行有效的处理才能排入大气中。主要讨论上述工业废气的分类、处理方式、应用范围及应用实例等。
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| 关 键 词： | 集成电路 工业废气处理 |
Waste Gas Treatment of IC |
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| Zhu Haiying,Huang Qiyu.Waste Gas Treatment of IC[J].Contamination Control & Air-Conditioning Technology,2008(2). |
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| Authors: | Zhu Haiying Huang Qiyu |
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| Institution: | Zhu Haiying and Huang Qiyu |
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| Abstract: | Waste gas of IC is acid gas of fluoride and sulfuric acid fog, alkali gas of ammonia, organic gas of Isopropyl alcohol and photo resist, dust gas of Silicon dioxide, process vent of silicon alkyl and phosphor alky. Most of them is Hazard and toxic; need be treat effectively before exhaust. The article introduces the composition, the methods of treatment and some practical projects of waste gas of IC. |
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| Keywords: | IC Industrial Waste gas treatment |
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