| 超高压力传感器绝缘封装薄膜的工艺研究 |
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| 引用本文： | 崔红玲,杨邦朝,杜晓松,滕林,周鸿仁.超高压力传感器绝缘封装薄膜的工艺研究[J].电子元件与材料,2004,23(12):25-27. |
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| 作者姓名： | 崔红玲 杨邦朝 杜晓松 滕林 周鸿仁 |
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| 作者单位： | 电子科技大学电子工程学院,四川,成都,610054;电子科技大学微固学院,四川,成都,610054 |
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| 基金项目： | 电子预研基金资助项目(AW030412) |
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| 摘 要： | 为了提高锰铜传感器的测压上限,须用薄膜工艺制备无机绝缘三氧化二铝薄膜来作为传感器的绝缘封装层。采用电子束蒸发法,对影响三氧化二铝薄膜的相关工艺如:蒸发原料的纯度、成膜次数进行了研究。最终得出:由99.99%的三氧化二铝原料制备出的薄膜致密性好、缺陷少,其绝缘电阻率和损耗分别可达1012O·cm和103量级;而采用多次间隙蒸发可明显改善薄膜的附着性和致密性。
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| 关 键 词： | 电子技术 锰铜传感器 三氧化二铝 绝缘薄膜 电子束蒸发 致密性 |
| 文章编号： | 1001-2028(2004)12-0025-03 |
Study on the Technique of Insulating Thin Film for Manganin Gauges Packaging |
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| CUI Hong-ling,YANG Bang-chao,DU Xiao-song,TENG Lin,ZHOU Hong-ren.Study on the Technique of Insulating Thin Film for Manganin Gauges Packaging[J].Electronic Components & Materials,2004,23(12):25-27. |
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| Authors: | CUI Hong-ling YANG Bang-chao DU Xiao-song TENG Lin ZHOU Hong-ren |
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| Abstract: | Aimed at extending the measurement range of manganin gauges, the manganin sensing elements were encapsulated in alumina thin films by e-beam evaporation. The effects of the purity of alumina source and deposition times on the properties of the films were investigated. Denser and less defects films can be prepared using a 99.99% alumina source. The resistivity and dielectric loss can be reached to 1012 Ocm and 103, respectively. The adhesion and density of the films can also be improved by sequential evaporation. |
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| Keywords: | electronic technology manganin sensor Al2O3 insulated film electron-beam evaporation density |
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