| 集成电路制造中的三束技术 |
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| 引用本文： | 马向国,刘同娟,顾文琪. 集成电路制造中的三束技术[J]. 电子工业专用设备, 2008, 37(4): 33-37 |
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| 作者姓名： | 马向国 刘同娟 顾文琪 |
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| 作者单位： | 北京物资学院,北京,101149;中国科学院电工研究所北京,100080 |
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| 摘 要： | 集成电路制造工艺技术种类繁多,包括光刻、刻蚀、氧化、扩散、溅射、封装等。作为代表性的先进工艺技术是电子束、离子束和光子束加工技术,俗称三束技术。对三束技术做了介绍。
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| 关 键 词： | 集成电路 电子束 离子束 光子束 |
| 文章编号： | 1004-4507(2008)04-0033-05 |
| 修稿时间： | 2008-03-30 |
The Three Beam Technology in IC Manufacturers |
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| Ma Xiang-guo,Liu Tong-juan,Gu Wen-qi. The Three Beam Technology in IC Manufacturers[J]. Equipment for Electronic Products Marufacturing, 2008, 37(4): 33-37 |
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| Authors: | Ma Xiang-guo Liu Tong-juan Gu Wen-qi |
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| Abstract: | The technology of integrated circuit fabrication has great variety,including photoetching,sculpture,oxidation,diffusion,sputtering,packaging and so on.The electron beam,the ion beam and the photon beam process technology is the representative advanced processing technology,which are named three beam technologies.This article has made the introduction to three beam technologies. |
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| Keywords: | IC Electron Beam Ion Beam Photon beam |
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