| 基于PDMS模具热模压制备微流控通道结构的方法 |
| |
| 引用本文： | 潘欣欣,陈翔,陈迪,庄贵生.基于PDMS模具热模压制备微流控通道结构的方法[J].微细加工技术,2007(1):46-50. |
| |
| 作者姓名： | 潘欣欣 陈翔 陈迪 庄贵生 |
| |
| 作者单位： | 1. 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海,200030
2. 中国科学院上海微系统与信息技术研究所,上海,200050 |
| |
| 摘 要： | 介绍了一种利用聚二甲基硅氧烷(PDMS)的快速成型来制备模具,再进行热模压制造微流控通道结构的方法。通过在硅片上旋涂SU-8胶进行光刻显影,得到结构模版,在此模版上浇注PDMS,脱模即得到PDMS模具。将PDMS模具进行热压,成功地在聚甲基丙烯酸甲酯(PMMA)基片上复制了特定的微流控通道结构。相对于常规的硅微加工和UV-LIGA工艺制造热模压模具,本方法具有加工周期短、工艺简单、成本低等优点。另外,还对温度、压力、时间等热模压的主要工艺参数进行了初步的优化研究。
|
| 关 键 词： | 模具 热模压 微流控 |
| 文章编号： | 1003-8213(2007)01-0046-05 |
| 修稿时间： | 2006年7月4日 |
Rapid Fabrication of Plastic Microfluidic Channels Using PDMS as Hot Embossing Tools |
| |
| PAN Xin-xin,CHEN Xiang,CHEN Di,ZHUANG Gui-sheng.Rapid Fabrication of Plastic Microfluidic Channels Using PDMS as Hot Embossing Tools[J].Microfabrication Technology,2007(1):46-50. |
| |
| Authors: | PAN Xin-xin CHEN Xiang CHEN Di ZHUANG Gui-sheng |
| |
| Abstract: | A simple method of fabricating microfluidic channels into polymer materials such as PMMA and COC was presented.Rapid prototyped PDMS(polydimethylsiloxane) were used as hot embossing tools,and some specific microfluidic structures were replicated into these polymer materials.Compared to the traditional methods of fabricating hot embossing tools such as silicon machining and UV-LIGA,this approach offers many advantages including very rapid processing,low cost,and reduction in complexity.The embossing parameters,including temperature,force,and time were optimized to reduce replication errors. |
| |
| Keywords: | PDMS |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
