| 软X射线自支撑闪耀透射光栅 |
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| 引用本文： | 徐向东, 陈勇, 邱克强, 刘正坤, 付绍军. 软X射线自支撑闪耀透射光栅[J]. 物理, 2012, 41(12): 796-802. |
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| 作者姓名： | 徐向东 陈勇 邱克强 刘正坤 付绍军 |
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| 作者单位： | 1.中国科学技术大学国家同步辐射实验室 合肥 230029 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划 |
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| 摘 要： | 软X射线自支撑闪耀透射光栅或临界角透射光栅是美国麻省理工学院为满足国际X射线天文台X射线光栅谱仪的科学要求而提出的一种新型衍射光栅，它集中了透射和反射光栅的优点，同时避免它们的缺点.文章对软X射线自支撑闪耀透射光栅的概念、基本原理、制作工艺进行了综述，介绍了美国麻省理工学院的光栅研制工作进展和文章作者的初步研究结果.
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| 关 键 词： | 软X射线 衍射光栅 综述 临界角 各向异性腐蚀 |
| 收稿时间： | 2012-07-21 |
Soft X-ray freestanding blazed transmission gratings |
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| XU Xiang Dong, CHEN Yong, QIU Ke Qiang, LIU Zheng Kun, FU Shao Jun. Soft X-ray freestanding blazed transmission gratings[J]. PHYSICS, 2012, 41(12): 796-802. |
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| Authors: | XU Xiang-Dong CHEN Yong QIU Ke-Qiang LIU Zheng-Kun FU Shao-Jun |
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| Affiliation: | 1.NationalSynchrotronRadiationLaboratory,UniversityofScienceandTechnologyofChina,Hefei230029,China |
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| Abstract: | To meet the requirements of the International X-ray Observatory (IXO), a new kind of diffraction grating called the soft X-ray freestanding blazed transmission grating, or critical-angle transmission (CAT) grating, has been developed by the Massachusetts Institute of Technology team.The CAT grating has the advantages of both transmission and reflection gratings, while avoiding their disadvantages. Its basic concept, principle, and fabrication process are reviewed. Recent advances in this field are also presented. |
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| Keywords: | soft X-ray diffraction grating review critical-angle anisotropic wet etching |
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