压电晶体位移特性曲线干涉自动测量方法

本文提出了压电晶体(PZT)位移物曲线自动干涉测量方法,该方法利用干涉仪把PZT的微位移量转化成干涉条纹相位变化量,通过快速傅里叶变换(FFT)方法自动复原干涉条纹中包含的相位的变化量,从而高精度地检测出PZT的位移特性曲线.根据该方法,利用CCD摄象机、图象板和干涉仪组合成一套光、机、电一体化的微位移自动测试系统,实际测量了我们研制的PZT随电压变化的位移特性曲线.实验表明,该方法原理实现简单,且能实现高精度、自动、实时和动态测量.

AUTOMATIC INTERFERENCE METHOD MEASURING THE CHARACTERISTIC CURVE OF PZT DISPLACEMENT

This paper presents an automatic interference method to measure the characteristic curve of PZT displacement.The method used the interferometer to make the PZT displacement transfer into the value of phase change.The value of phase change can be retrieved from the shifting carrier frequency interferogram by using Fast Fourier Transform (FFT),then the characteristic curve of PZT displacement was obtained accurately.Based on this method,the automatic measuring system which is a combination of optic,mechanics,electricity and algorithm was established with the CCD camera,the image gabber and interferometer.Using this system,the characteristic curve of the PZT which was made by ourselves was measured.The results show that this method has these features such as sample,high accuracy,automatic,real time and dynamic.