| 300mm平面标准镜装卡结构的关键参数 |
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| 引用本文： | 田伟,王汝冬,王平,隋永新,王立朋. 300mm平面标准镜装卡结构的关键参数[J]. 中国光学与应用光学文摘, 2011, 0(3) |
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| 作者姓名： | 田伟 王汝冬 王平 隋永新 王立朋 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室; |
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| 基金项目： | 02专项基金资助项目(No.2009ZX02205) |
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| 摘 要： | 为了实现大口径平面标准镜的高精结构装卡,对其在重力作用下的面形变化进行了研究。首先,对结构胶的有限元建模进行了理论分析,建立了大口径平面标准镜胶结装卡结构有限元模型。然后,分析了不同胶点数量及分布、不同胶接面积以及不同镜框支撑方式等关键结构参数对参考面面形的影响。最后,设计了大口径平面标准镜胶结及支撑的结构。结果表明,采用胶点直径为5 mm,12×3胶点分布形式胶结时,参考面面形的PV值为24.06 nm,RMS值为6.78 nm,满足了大口径平面标准镜面形精度的要求。
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| 关 键 词： | 光学检测 球面标准镜 参考面 有限元法 |
Key structural parameters of 300 mm aperture reference flat mirror |
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| TIAN Wei,WANG Ru-dong,WANG Ping,SUI Yong-xin,WANG Li-peng. Key structural parameters of 300 mm aperture reference flat mirror[J]. Chinese Optics and Applied Optics Abstracts, 2011, 0(3) |
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| Authors: | TIAN Wei WANG Ru-dong WANG Ping SUI Yong-xin WANG Li-peng |
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| Affiliation: | TIAN Wei,WANG Ru-dong,WANG Ping,SUI Yong-xin,WANG Li-peng (State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China) |
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| Abstract: | In order to design the structures of large-aperture reference flat mirrors with high-precision,the shapes of a large-aperture reference flat mirror were studied under gravitational conditions.Firstly,the establishing method of the structure adhesive by finite element analysis was elaborated,and the finite element model of large-aperture reference flat mirror supported with adhered spots was established.Then,the influences of different number of adhered points and point distribution,different sizes of spots ... |
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| Keywords: | optical test reference sphere mirror reference surface finite element method |
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