LCVD of tungsten microstructures on quartz |
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Authors: | Z. Toth P. Kargl C. Grivas K. Piglmayer T. Szörenyi D. Bäuerle |
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Affiliation: | (1) Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040 Linz, Austria |
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Abstract: | The pyrolytic laser-induced chemical vapor deposition (LCVD) of tungsten microstructures in the form of spots has been investigated. Fused quartz substrates and a mixture of WF6 and H2 have been employed in the experiments. Different shapes of spots related to different partial pressures of WF6 and H2 have been revealed. The results can qualitatively be described by a combination of surface reactions and gas-phase reactions resulting in tungsten deposition and surface etching.On leave from: Reserch Group on Laser Physics of the Hungarian Academy of Sciences, H-6720 Szeged, Dòm tér 9, Hungary |
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Keywords: | 42.60 81.15 82.00 |
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