LCVD of tungsten microstructures on quartz

The pyrolytic laser-induced chemical vapor deposition (LCVD) of tungsten microstructures in the form of spots has been investigated. Fused quartz substrates and a mixture of WF₆ and H₂ have been employed in the experiments. Different shapes of spots related to different partial pressures of WF₆ and H₂ have been revealed. The results can qualitatively be described by a combination of surface reactions and gas-phase reactions resulting in tungsten deposition and surface etching.On leave from: Reserch Group on Laser Physics of the Hungarian Academy of Sciences, H-6720 Szeged, Dòm tér 9, Hungary