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Destruction of Organic Compounds in a High-Frequency Discharge Plasma at Reduced Pressure
Authors:Teplý  J  Dressler  M  Janča  J  Tesa>r  C
Institution:25.Institute of Analytical Chemistry, Academy of Sciences of the Czech Republic, Veve?i 97, 611 42, Brno, Czech Republic
;35.Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlá?ská 2, 611 37, Brno, Czech Republic
;
Abstract:Plasma Chemistry and Plasma Processing - Conditions of the destruction of organic compounds in a hf discharge plasma at reduced pressure and parameters of this plasma type are determined. The...
Keywords:
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