降低表面波纹误差的加工轨迹优化方法

提出了一种降低光学元件表面波纹误差的加工方法。从中高频误差的产生过程出发，在常用的光栅型加工轨迹的步进方向上叠加一个随机扰动，通过破坏轨迹的规则性分布，有效抑制了特定频率的中频误差。利用信息熵原理，对生成的随机轨迹进行分析，得出其影响波纹误差抑制能力的关键因素——扰动幅值。在此基础上，对生成的随机扰动型轨迹进行平滑和改进，从而降低其对机床动态性能的要求，通过仿真模拟，验证了优化后的轨迹同样能够有效地降低光学元件表面波纹误差。

Optimizing method of machining paths for reducing ripple errors

A method to reduce the ripple errors is proposed by analyzing the generation of medium and high frequency errors. To break the regular distribution of the path, a random disturbance is added to the stepping direction of the grating path, and the errors of a specific frequency are effectively suppressed.The random path is analyzed based on the principle of information entropy, and it is concluded that the disturbance amplitude is the key factor to reduce the ripple errors.On this basis, the generated random perturbation path is smoothed and optimized to reduce the dynamic performance requirements of machine tools. The simulation results show that the optimized path can reduce the surface ripple errors effectively.