|
|||||
|
|
| Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry | |
| 作者姓名： | 杜艳丽 严惠民 吴勇 姚晓强 聂永军 施柏煊 |
| 作者单位： | State Key Lab of Modern Optical Instrumentation National Engineering & Technology Research Center for Optical Instrument，Zhejiang University，Hangzhou 310027，State Key Lab of Modern Optical Instrumentation National Engineering & Technology Research Center for Optical Instrument，Zhejiang University，Hangzhou 310027，State Key Lab of Modern Optical Instrumentation National Engineering & Technology Research Center for Optical Instrument，Zhejiang University，Hangzhou 310027，State Key Lab of Modern Optical Instrumentation National Engineering & Technology Research Center for Optical Instrument，Zhejiang University，Hangzhou 310027，State Key Lab of Modern Optical Instrumentation National Engineering & Technology Research Center for Optical Instrument，Zhejiang University，Hangzhou 310027，State Key Lab of Modern Optical Instrumentation National Engineering & Technology Research Center for Optical Instrument，Zhejiang University，Hangzhou 310027 |
| 摘 要： | A new differential white light interference technique for the thickness measurements of metal foil is presented. In this work, the differential white light system consists of two Michelson interferometers in tandem, and the measured reflective surfaces are the corresponding surfaces of metal foil. Therefore, the measuring result is only relative to the thickness but not the position of metal foil. The method is non-contact and non-destructive, it has the advantages of high accuracy, fast detection, and compact structure. Theoretical analysis and preliminary experimental verifications have shown that the technique can be used to measure the thickness of foil in the range of 1 to 80 μm with accuracy better than 0.08 μm. |
| 本文献已被 CNKI 等数据库收录！ | |