Diagnostics of Atmospheric Pressure Surface Discharge Plasmas in Argon

Atmospheric pressure surface discharge is shown to have great prospects for a number of industrial applications.To acqu/re better results in application fields and considering that the study of the basic parameters includingelectron temperature and electron density is desirable, we develop an equivalent circuit model and the diagnostictechniques based on optical emission spectroscopy and electrical measurement in our laboratory. The electrontemperature has been determined to be about 0.7eV by a Fermi-Dirac model. The electron density has beencalculated to be near 10^10 cm^-3 from a time resolved electrical measurement (Ohmic heating method).