Calibration of depth profiles of microparticles measured with plasma-based secondary neutral mass spectrometry |
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| Authors: | J Goschnick J Schuricht and H J Ache |
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| Institution: | (1) Institut für Radiochemie, Kernforschungszentrum Karlsruhe GmbH, Postfach 3640, D-76021 Karlsruhe, Germany |
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| Abstract: | A gravimetric method is presented for the easy determination of sputter erosion rates for powders, applicable also to non-conducting materials. Measurements of the erosion rates of 22 powders gave an average value of 0.4 nm/s ±50% for bombardment with 400 eV Ar+ at 1 mA/cm2. The validity of the data has been demonstrated with technical pigments and outdoor aerosol particles. |
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