Polymer surface erosion under an oxygen plasma stream |
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| Authors: | V N Chernik A A Paskhalov A I Gaidar |
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| Institution: | (1) Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, 119991, Russia;(2) Research Institute of Advanced Materials and Technology, Moscow State Institute of Electronics and Mathematics (Technical University), ul. Malaya Pionerskaya 12, Moscow, 115054, Russia |
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| Abstract: | Erosion of a polyimide, polyethylene, polyethylene terephthalate, polymethylmethacrylate in oxygen plasma streams with the particle average energy of 20–30 eV is investigated. The erosion yield of the materials with respect to the polyimide is measured by the gravimetric method. The surface texture formed under etching is investigated using a scanning electron microscope. It is shown that a relative erosion yield takes similar values at energies of 5 eV and 20–30 eV and surface reliefs contain similar elements. |
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