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极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析
引用本文:李文昊,姜岩秀,吴娜,张桐,王鹍.极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析[J].发光学报,2015,36(9):1094-1099.
作者姓名:李文昊  姜岩秀  吴娜  张桐  王鹍
作者单位:中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
基金项目:国家重大科学仪器设备开发专项资金(2011YQ120023)资助项目
摘    要:针对应用于50~150nm波段的变栅距光栅, 采用球面波曝光系统进行优化设计, 分析了不同宽度光栅的刻槽密度变化和光谱分辨能力。理论分析结果表明, 光栅宽度为4mm时, 理论分辨能力高于14000;光栅宽度为10mm时, 理论分辨能力约为9000;光栅宽度为30mm时, 理论分辨能力急剧下降, 约为3000。光栅的宽度越大, 其刻槽弯曲程度就越大, 光栅的光谱分辨能力就越低, 因此球面波曝光系统只适合制作宽度较小的变栅距光栅。

关 键 词:变栅距光栅  球面波  刻槽密度  光谱分辨能力
收稿时间:2015-05-25

Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum
LI Wen-hao,JIANG Yan-xiu,WU Na,ZHANG Tong,WANG Kun.Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum[J].Chinese Journal of Luminescence,2015,36(9):1094-1099.
Authors:LI Wen-hao  JIANG Yan-xiu  WU Na  ZHANG Tong  WANG Kun
Institution:Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
Abstract:For the varied line-space (VLS) grating used in the region of 50-150 nm, the spherical wave exposure system was used for the optimization design, and the groove density and spectra resolution of the different width grating were analyzed. The theory resolution ability is higher than 14000 when the grating width is 4mm in the use of wavelength range, about 9000 when the grating width is 10mm, and about 3000 when the grating width is 30mm, respectively. The bigger the grating width is, the bigger the bending degree of groove is, and the lower the spectral resolution ability is. Therefore, spherical wave exposure system is only suitable for making the VLS grating with smaller width.
Keywords:varied-line-space grating  spherical wavefront  groove density  spectral resolution
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