| 隔层不交叠多层电感分析与设计 |
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| 引用本文： | 祝文韬,李小进,蔡静,胡少坚,王勇,李曦,石艳玲.隔层不交叠多层电感分析与设计[J].电子器件,2011,34(6):641-644. |
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| 作者姓名： | 祝文韬 李小进 蔡静 胡少坚 王勇 李曦 石艳玲 |
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| 作者单位： | 华东师范大学信息学院电子系;上海集成电路研发中心 |
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| 基金项目： | 国家重大科技专项(2009ZX02023-2-1);上海市科委启明星计划(09QB1402000) |
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| 摘 要： | 提出了一种隔层不重叠的新型结构片上螺旋电感,其实现工艺与标准CMOS多层布线技术兼容.结合螺旋电感的集总模型,利用电磁场仿真软件HFSS进行了该器件的模拟仿真,与相同结构参数和工艺参数的传统不隔层交叠多层电感相比,提出的新型电感在品质因子、自谐振频率、3dB带宽等性能参数上明显改善,其中电感品质因子提高3.5％,带宽增...
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| 关 键 词： | 多层电感 品质因子 HFSS仿真 损耗 |
The analysis and design of non-overlapping multi-layer inductor |
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| ZHU Wentao,LI Xiaojin,CAI Jing,HU Shaojian,WANG Yong,LI Xi,SHI Yanling.The analysis and design of non-overlapping multi-layer inductor[J].Journal of Electron Devices,2011,34(6):641-644. |
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| Authors: | ZHU Wentao LI Xiaojin CAI Jing HU Shaojian WANG Yong LI Xi SHI Yanling |
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| Institution: | 1.East China Normal University,Department of Electronic Engineering,Shanghai 200241,China;2.Shanghai Integrated Circuit Research and Development Center,Shanghai 201203,China |
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| Abstract: | An on-chip spiral inductor with non-overlapping structure has been presented.Its manufacturing process is compatible with the standard CMOS multi-layer process.Based on the lumped model of the spiral inductor,the proposed inductor has been simulated using HFSS.At the same time,performance comparisons between the proposed inductor and the traditional multi-layer inductor have been carried out with the same process parameters.Simulation results show that the proposed achieve an increase of 3.5% for the maximum quality factor,an increase of 65% for the BW,and an increase of 127% for the self resonance frequency.Meanwhile,the inductance frequency range of maximum quality factor is around several nH,and can meet the requirement of most RF circuits. |
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| Keywords: | multi-layer inductor quality factor HFSS simulation loss |
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