| 大口径精密投影光刻制版镜头的光学装校 |
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| 引用本文： | 魏全忠,蒋世磊,马天梦,陈品志. 大口径精密投影光刻制版镜头的光学装校[J]. 光学技术, 2001, 27(6): 493-494 |
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| 作者姓名： | 魏全忠 蒋世磊 马天梦 陈品志 |
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| 作者单位： | 中国科学院,光电技术研究所, |
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| 摘 要： | 对于大口径精密投影光刻制版镜头来说 ,透镜的应力变形和中心误差对整个系统的成像质量有较大影响。详细介绍了一种减小应力变形的特殊结构和在一种光学装校过程中多镜组整体对接的方法 ,给出了对接前后的偏心测量数据以及镜头实际曝光的图形。
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| 关 键 词： | 制版镜头 中心误差 光学装校 最佳基准轴 |
| 文章编号： | 1002-1582(2001)06-0493-02 |
| 修稿时间： | 2001-05-04 |
Optical assembly and rectification of big aperture's precision photolithographic plate-making lenses |
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| WEI Quan-zhong,JIANG Shi-lei,MA Tian-meng,CHEN Pin-zhi. Optical assembly and rectification of big aperture's precision photolithographic plate-making lenses[J]. Optical Technique, 2001, 27(6): 493-494 |
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| Authors: | WEI Quan-zhong JIANG Shi-lei MA Tian-meng CHEN Pin-zhi |
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| Abstract: | For big aperture′s precision photolithographic plate-making lenses, the stress distortion and centering errors of lenses can make a bad effect on imaging quality. A special configuration reducing stress distortion and a method for integral coupling of multi-lenses connecting in the processing of optical assembly and rectification are given in detail. The testing data before and after coupling and the exposure pattern of the lens are presented. |
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| Keywords: | plate-making lenses centering errors optical assembly and rectification best optical axis |
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