An alternative method for the dechannelling correction in channelling-backscattering experiments |
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Authors: | N P Tognetti |
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Institution: | 1. Department of Electrical Engineering , University of Salford , Salford, M5 4WT, U.K.;2. (Visiting Research Fellow in the Department of Electrical Engineering, University of Salford). , Centro Atomico Bariloche, Argentina |
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Abstract: | An alternative procedure to evaluate the dechannelling correction for the extraction of disorder depths distributions, particularly for high levels of disorder, in channelling-backscattering studies is described. It involves the use of experimentally determined values of dechannelling and was used for the extraction of damage distributions in a study of disorder generated by 40 keV N+, P+, As+ and Bi+ and 20-200 keV Sb+ bombardment of (100) GaAs at 40°K. As a result the method appears applicable at least when thermal annealing of disorder is absent. A comparison with various models of small angle scattering is also made. |
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Keywords: | Electron-stimulated desorption Alkali halides Temperature program desorption Radiation damage Ion desorption |
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