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The development of surface morphology during sputtering with spatially nonuniform ion beams |
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| Authors: | M J Nobes R P Webb G Carter J L Whitton |
| Affiliation: | 1. Department of Electrical Engineering , University of Salford , Salford, M5 4WT, UK.;2. Physics Laboratory II, H C ?rsted Institute , University of Copenhagen , Universitetsparken 5, 2100, Copenhagen ?, Denmark |
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