Visualization and interferometry for cylindrical and spherical sample tomography and profilometry

A technique combining image processing and laser interferometry for visualizing and detecting the deformation of transparent cylindrical and spherical sample is proposed. This deformation includes geometric deformation such as volume transition in profilometry and physical deformation such as refractive index change in tomography. Phase contour lines are used for quantitative analysis and graphical representation of the deformation. This method allows us to visually detect the spatial variation of the deformation field and to evaluate the test quality such as misalignment of optical system. A theoretical analysis using phase contour map to characterize the deformation field is described in detail. A method using phase contour map to qualify the interferometric test is proposed. Analysis of test examples is carried out. Suggestions on using phase contour line method to ameliorate test system design are finally discussed.