A generalized dynamic model of nanoscale surface acoustic wave sensors and its applications in Love wave propagation and shear-horizontal vibration |
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| Affiliation: | 1. State Key Laboratory for Strength and Vibration of Mechanical Structures, School of Aerospace, Xi''an Jiaotong University, Xi''an 710049, China;2. MOE Key Laboratory for Multifunctional Materials and Structures, School of Aerospace, Xi''an Jiaotong University, Xi''an 710049, China;3. Department of Civil Engineering, Xi''an Jiaotong University, Xi''an 710049, China;1. State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 410082 PR China;2. School of Science, Engineering & Design, Teesside University, Middlesbrough, UK;1. State Key Laboratory for Strength and Vibration of Mechanical Structures, Xi''an Jiaotong University, Xi''an 710049, Shaanxi, China;2. Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588-0526, USA;1. School of Transportation & Logistics, Dalian University of Technology, China;2. Dept. of Civil Engineering and Dept. of Mathematics, University of Akron, USA;3. School of Water Conservancy and Environment, Zhengzhou University, Zhengzhou, China |
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| Abstract: | A generalized dynamic model to depict the wave propagation properties in surface acoustic wave nano-devices is established based on the Hamilton's principle and variational approach. The surface effect, equivalent to additional thin films, is included with the aid of the surface elasticity, surface piezoelectricity and surface permittivity. It is demonstrated that this generalized dynamic model can be reduced into some classical cases, suitable for macro-scale and nano-scale, if some specific assumptions are utilized. In numerical simulations, Love wave propagation in a typical surface acoustic wave device composed of a piezoelectric ceramic transducer film and an aluminum substrate, as well as the shear-horizontal vibration of a piezoelectric plate, is investigated consequently to qualitatively and quantitatively analyze the surface effect. Correspondingly, a critical thickness that distinguishes surface effect from macro-mechanical behaviors is proposed, below which the size-dependent properties must be considered. Not limited as Love waves, the theoretical model will provide us a useful mathematical tool to analyze surface effect in nano-devices, which can be easily extended to other type of waves, such as Bleustein-Gulyaev waves and general Rayleigh waves. |
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