Morphological transformations of vanadium oxide films during low-temperature reduction in hydrogen electron cyclotron resonance plasma |
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Authors: | V. Sh. Aliev V. N. Votentsev A. K. Gutakovskii S. M. Maroshina D. V. Shcheglov |
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Affiliation: | (1) Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia |
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Abstract: | Morphological transformations of amorphous vanadium oxide films obtained by the sol-gel method and polycrystalline V2O5 films are studied during their low-temperature (295–623 K) reduction in a hydrogen electron cyclotron resonance plasma. The morphology of films is analyzed using atomic force microscopy and high-resolution electron microscopy. It is found that a homogeneous amorphous film during the reduction process transforms to an island film and then bulk amorphous islands of a regular shape appear. These islands resemble microcrystals, and their concentration depends on the temperature and the reduction time. The low-temperature reduction of polycrystalline V2O5 films leads to their amorphization; however, the microcrystals in the polycrystalline film do not change their shape in this process. A mechanism of the reduction process is proposed. This mechanism explains the regularities of morphological transformations in amorphous sol-gel films of vanadium oxides based on the suggestion of a competition between the ion-stimulated nucleation and growth of nuclei of the crystalline phase and the amorphization of the growing nuclei. |
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