Annealing effect of platinum-based electrodes on physical properties of PZT thin films |
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Affiliation: | 1. Department of Nano- Fusion Technology, Pusan National University, 50 Cheonghak-ri, Samnangjin-eup, Miryang 627-706, Republic of Korea;2. Department of Physics, Pusan National University, Busan 609-735, Republic of Korea;3. Busan Center, Korea Basic Science Institute, Busan 609-735, Republic of Korea |
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Abstract: | This study examined the crystal structure and surface morphology, including the Ti segregation mechanism on the surface due to the inter-diffusion between Pt, Ti and TiOx as a glue layer, according to the annealing temperature and growth orientation of a Pt film. In addition, the fatigue mechanism of ferroelectric PZT thin films deposited on a Pt-based electrode was also investigated. The nano-structure, orientation mapping, and micro-morphologies of the triangular Pt hillocks were investigated by scanning electron microscopy with an electron backscatter diffraction (EBSD) function. The D–E hysteresis loop of the ferroelectric films was measured using a Sawyer–Tower circuit at 1 kHz to obtain the remanent polarization and coercive field. |
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