Indentation deformation of mesoporous anodic aluminum oxide |
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| Affiliation: | 1. Institute of Mechanical and Electromechanical Engineering, National Formosa University, 64 We-Hua Road, Yunlin 632, Taiwan, ROC;2. Stress-Thermal Laboratory, Advanced Semiconductor Engineering, Inc., Kaohsiung 811, Taiwan, ROC;3. Department of Mechanical Engineering, Southern Taiwan University, Tainan 710, Taiwan, ROC |
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| Abstract: | Mechanical properties of anodic aluminum oxides (AAO) were achieved by means of a scanning electron microscope (SEM), an atomic force microscope (AFM), and indentation measurements. A two-step anodized mesoporous anodic aluminum oxide was successfully fabricated vertically and hollowly. Both microindentation and nanoindentation were carried out. Localized pop-in can be found during nanoindentation due to the collapse of the beneath cylindrical structures. Over a certain load, microindentation may induce radial cracks from the indented edge to outward of the AAO. The underside of the indented AAO sample was milled to figure out the structural changes. |
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