Microstructures and nano mechanical properties of the metal tungsten film |
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Institution: | 1. College of Materials Science and Engineering, Hebei University of Technology, Tianjin 300130, China;2. National Key Lab for Remanufacturing, Academy of Armored Forces Engineering, No. 21 Dujiakan, Changxindian, Beijing 100072, China;3. Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China |
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Abstract: | The W film was prepared on 1045 steel by magnetron sputtering, with the thickness of 2 μm, its surface and cross-section morphologies were investigated with SEM, and the phase structure was analyzed with XRD. X-ray stress determinator was utilized to measure its residual stress, and the nano-hardness and elastic modulus of the film were surveyed by nano-indentation tester. The results show that the surface of W film is very compact and smooth; the particles arranged regularly, the granularity of the thin film is about 1 μm. The microcracks, cavities and desquamation were not found in the film and interface, and the bonding between the W film and substrate is well. The XRD results showed that the W film had a body-centered cubic structure, the lattice constant: a = 0.316 nm, the growth preferred orientations are (1 1 0) and (2 2 0). The compressive stress (?169 MPa) was found on the surface. The average nano-hardness and elastic modulus of W film are 15.22 GPa, 176.64 GPa, respectively, and the mechanical properties of W film are well. |
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