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A one-dimensional fluid simulation of a magnetized DC discharge including the non-uniform effects of the magnetic field
Institution:Department of Electrical Engineering, Graduate School, Chungbuk National University, Chungju, Chungbuk 361-763, Republic of Korea
Abstract:A one-dimensional simulation of a magnetized DC discharge is conducted based on the fluid equations that consider the non-uniform effects of the magnetic field. We apply a dielectric relaxation scheme (DRS) as an efficient numerical algorithm that was recently developed for simulation of low-temperature process plasmas. The simulation results, such as the spatial profiles of ion densities, electron densities, electron fluxes, and electric fields, are compared with the simulation results for which the non-uniform effects of the magnetic field are neglected.
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