Abstract: | A modified low pressure in-situ synthesis LEC method of growing undoped SI (semi-insulating) GaAs crystals has been established. The key points for controlling melt composition and As evaporation during synthesis and growth have been described. Using this novel approach, crystals are able to be grown from the nominal melt composition in the range of 0.491–0.499 As fraction with high reproducibility. Some characteristics of the undoped SI crystals grown by the present work including electrical properties, dislocation density, carbon and EL2 concentrations and thermal annealing effects have been studied. |