| 点衍射干涉术在扫描力显微镜中的应用 |
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| 引用本文： | 牟旭东,卓永模.点衍射干涉术在扫描力显微镜中的应用[J].光学学报,1998,18(6):88-692. |
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| 作者姓名： | 牟旭东 卓永模 |
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| 作者单位： | 浙江大学光学与科学仪器系 |
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| 摘 要： | 目前在扫描力显微镜中经常用到的氮化硅三角形探针本身可以作为一个基于点微射干涉的微干涉元件。本文讨论了一种根据这一原理设计的用于扫描力显微镜的干涉光探针，它利用微探针表面几何反身波与后向点衍射波之间的干涉来检测微探针的形变，其纵向分辨率达到０．０１ｎｍ。
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| 关 键 词： | 扫描力显微镜 点衍射干涉术 微探针 测量原理 |
| 收稿时间： | 1997/5/2 |
Application of Point Diffraction Interferometer in Scanning Force Microscope |
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| Abstract: | A new optical interferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element. The deflection of the cantilever is detected by the interference between the geometrical reflected wave and the backward diffracted wave. This interferometer has a simple structure, fewer optical components, low cost, and common light path. 0.01 nm vertical resolution is obtained by this instrument. |
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| Keywords: | scanning force microscopy point diffraction interferoemter cantilever |
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