Orientation and Surface Properties of Sol-Gel Derived Y2O3 Films

The orientation, surface and optical properties of sol-gel derived Y₂O₃ films have been investigated. Transparent Y₂O₃ films were prepared on quartz glass substrates by sol-gel processes using YCl₃·6H₂O as a starting material. The water droplet contact angles of the films reached constant values between 79° and 90° after the films were left for 8 to 10 days in air at ambient temperature, indicating that the film surface exhibited hydrophobicity. When 2-(2-methoxyethoxy)ethanol (MEE) was added to the sol, yttria in the films crystallized to a strongly oriented cubic phase at firing temperatures between 400°C and 500°C. The intensity of the XRD peaks increased as the firing temperature was increased to 900°C. However, yttria crystallized to a non-oriented cubic phase when MEE was not used. The refractive index and packing density of the Y₂O₃ films increased from 1.55 to 1.68 and from 0.67 to 0.79, respectively, as the firing temperature was raised from 400°C to 900°C, indicating that sol-gel derived Y₂O₃ films are lower in density than evaporated ones.