| 硅微机械陀螺仪的机电接口模型分析 |
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| 引用本文： | 杨波,苏岩,施芹,周百令. 硅微机械陀螺仪的机电接口模型分析[J]. 中国惯性技术学报, 2005, 13(5): 49-53,57 |
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| 作者姓名： | 杨波 苏岩 施芹 周百令 |
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| 作者单位： | 东南大学仪器科学与工程系,南京,210096 |
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| 基金项目： | 总装备部十五国防预研课题（41308050109）及国家高技术研究发展计划（863计划）（2002AA812038） |
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| 摘 要： | 建立了某种硅微机械陀螺仪的电路模型,分析了寄生电容对接口电路的影响.结果表明,合理的接口电路不仅消除了大部分的寄生电容的影响,而且减小了信号的衰减幅度,抑制了大部分的耦合信号和噪声信号.最后对接口电路进行了改进,除了保留以上的一些优点外,还减小了载波信号的变化和电源变化对电容分辨率的影响,提高了整个电路的分辨率.
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| 关 键 词： | 硅微机械陀螺仪 机电接口模型 寄生电容 分辨率 |
| 文章编号： | 1005-6734（2005）05-0049-05 |
| 收稿时间： | 2005-07-19 |
| 修稿时间： | 2005-07-19 |
Analyses on Electromechanical Interface Model of Silicon Micromachined Gyroscope |
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| YANG Bo,SU Yan,SHI Qin,ZHOU Bai-ling. Analyses on Electromechanical Interface Model of Silicon Micromachined Gyroscope[J]. Journal of Chinese Inertial Technology, 2005, 13(5): 49-53,57 |
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| Authors: | YANG Bo SU Yan SHI Qin ZHOU Bai-ling |
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| Affiliation: | Department of Instrument Science and Engineering, Southeast University, Nanjing 210096, China |
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| Abstract: | The electromechancial interface model of silicon micromachined gyroscope is established. The impacts of these parasitic capacitances on interface circuit are analyzed. The analytic results indicate that the reasonable interface circuit can substantially remove the impacts of these parasitic capacitances, reduce the attenuation of signal, restrain the noise signal and coupling signal. Finally the interface circuit is improved. The results show that besides these merits mentioned above, it can also reduce the impacts of the changes of carrier wave and power supply on resolution and improve the resolution. |
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| Keywords: | silicon micromachined gyroscope(SMG) electromechanical interface model parasitic capacitance resolution |
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