Conduction mechanisms in pyrolytically grown dielectrics |
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| Authors: | V F Korzo |
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| Institution: | (1) Moscow Institute of Steel and Alloys, USSR |
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| Abstract: | Various conduction mechanisms in thin SiO2, Al2O3, In2O3 layers were investigated experimentally by analyzing the behavior of the current as a function of field strength and temperature. The films were obtained by pyrolytic dissociation of organic compounds in the vapor phase.The author is indebted to P. S. Kireev for guidance, and to M. I. Elinson and V. B. Sandomirskii for interest in the investigation. |
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