Visible photoluminescence and its mechanisms from a-SiOx : H films with different stoichiometry

The photoluminescence (PL) properties of H-rich amorphous silicon oxide thin films prepared by dual-plasma chemical vapor deposition have been studied. The three commonly reported PL bands centered around 1.7, 2.1 and 2.9 eV have been detected from the same type of a-SiO_x : H material, only by varying the oxygen content (x≈1.35, 1.65, 2). In order to characterize the PL bands, the samples in as-prepared and annealed states up to 900°C have been analyzed by XPS, FT-IR, gas effusion, ESR and ellipsometry. Temperature quenching experiments are crucial to distinguish the 1.7 eV band, fully consistent with a bandtail-to-bandtail transition, from radiative defect luminescence mechanisms attributed either to defects related to Si–OH groups (2.9 eV) or to oxygen vacancy defects (2.1 eV).