一种新型三自由度谐振式MEMS陀螺

针对谐振式MEMS陀螺检测带宽与检测灵敏度相矛盾的问题,根据两质量块谐振器具有对机械位移放大的特点,提出了一种新型结构的谐振式MEMS陀螺,采用单自由度驱动、双自由度检测,驱动模态谐振频率落在检测模态两个质量块谐振频率叠加形成的平坦区域内,有效增加了陀螺检测带宽,提高了陀螺的抗干扰性能。建立了新型谐振式MEMS陀螺结构动力学模型,对陀螺结构进行有限元仿真分析,在常压环境下对陀螺结构进行测试。结果表明,该结构有效增加陀螺检测带宽,改善了陀螺的抗干扰性能,克服了由于工艺加工精度不足带来的陀螺结构不对称所引起的误差,降低了对加工工艺和加工精度的要求。

A Novel 3-Degree-of-Freedom(3-DOF) Oscillational MEMS Gyroscope

According to the questions of contradictions between bandwidth and sensitivity in the sense-mode of oscillational MEMS gyroscope,and the characteristic of the dual-mass oscillator amplifying the displacement,a novel 3-degree-of-freedom(DOF)micromachined gyroscope was proposed.The gyroscope used a 1-DOF drive,a 2-DOF check.The sense-mode oscillator provides a flat region in the sense-mode frequency response curve,where the amplitude and phase of the response are insensitive to parameter fluctuations.Thus,the bandwidth is increased,the robustness is improved,and the sensitivity is also improved by utilizing dynamical amplification of oscillations in the 2-DOF sense-mode oscillator.The novel gyroscope dynamic was modeled and analyzed by the finite element method(FEM),and was tested under the atmospheric press.The results show that the structure can increase the bandwidth,improve the robustness,reduce the error of the structure asymmetry by the lack of the process precision and the request of process technics and process precision.