| 消除相位测量轮廓术中多路径效应的影响 |
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| 引用本文： | 杨洋,龙云飞,吴炜,杨晓敏,刘凯. 消除相位测量轮廓术中多路径效应的影响[J]. 强激光与粒子束, 2015, 27(4): 041013-77. DOI: 10.11884/HPLPB201527.041013 |
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| 作者姓名： | 杨洋 龙云飞 吴炜 杨晓敏 刘凯 |
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| 作者单位： | 1.四川大学 电气信息学院, 成都 61 0065; |
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| 基金项目： | 国家自然科学基金项目(61271330,61473198);四川省科技厅支撑项目(2014GZ0005);四川大学引进人才科研启动经费资助课题(2082204164059) |
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| 摘 要： | 提出了一种减小多路径效应带来的误差影响的方法,优化了相位测量轮廓术,利用亮度调制的差分图确定了受多路径效应影响大的区域,并根据相邻像素点的相位进行校正。实验表明,该方法有效地减小了相位误差,提高了三维测量的精度,校正后相位误差的均方根值比校正前减小了约57.3%。
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| 关 键 词： | 相位测量轮廓术 多路径效应 相位误差校正 CCD成像 插值 |
| 收稿时间： | 2014-11-23 |
Eliminating phase error caused by multi-path effect for phase measuring profilometry |
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| Yang Yang;Long Yunfei;Wu Wei;Yang Xiaomin;Liu Kai. Eliminating phase error caused by multi-path effect for phase measuring profilometry[J]. High Power Laser and Particle Beams, 2015, 27(4): 041013-77. DOI: 10.11884/HPLPB201527.041013 |
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| Authors: | Yang Yang Long Yunfei Wu Wei Yang Xiaomin Liu Kai |
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| Affiliation: | 1.School of Electrical Engineering and Information,Sichuan University,Chengdu 610065,China;2.College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China |
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| Abstract: | The multi-path effect can cause undesirable phase error in regions with dramatically varied albedo. This paper proposes an effective method to correct such an error. The difference map of modulation is generated to precisely detect regions affected by the multi-path effect, and the phase error in the detected regions is corrected according to neighbor phase. Experimental results demonstrate the validity of the proposed method and show a reduction by 57.3% in the root mean square of phase errors. |
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