Fundamentals of Measurement in Terahertz Time-Domain Spectroscopy

Terahertz time-domain spectroscopy (THz-TDS) has emerged as a main spectroscopic modality to fill the frequency range between a few hundred gigahertz to a few terahertz. This spectrum has been known as “terahertz gap” owing to limited accessibility by conventional electronic and optical techniques. Over the past two decades, THz-TDS has evolved substantially with enhanced compactness and stability. Since THz-TDS is becoming an industrial standard, the performance and precision of the system are of prime importance. This article provides an overview on terahertz metrology, including parameter estimation, signal processing, measurement characteristics, uncertainties, and calibrations. The overview serves as guidance for metrology and further developments of THz-TDS systems.