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X-ray preionised excimer laser and its applications |
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| Authors: | Lou Qihong |
| Affiliation: | (1) Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, P.O. Box 8211, Shanghai, China |
| Abstract: | Performance of an X-ray preionised XeCl excimer laser is presented, a maximum output of 30 W (1.2 J/25 Hz) has been obtained. This laser was applied in laser semiconductor processing, laser deposition and laser photolithography. |
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