Radiolysis of resist polymers. VI. Copolymers of trihalophenylmethacrylate and methyl methacrylate

Copolymers of several compositions of methyl methacrylate (MMA), trichlorophenyl methacrylate (TCPMA), and tribromophenyl methacrylate (TBPMA) have been synthesized and characterized. Gamma radiolysis yields are very sensitive to the presence of the halogenated monomers. With less than 10% of the halogenated monomer in the copolymers. G_s values were found to be much greater than that of PMMA. However, the halogenated monomer introduces a tendency toward crosslinking. The results are consistent with the enhancement of chain scission by dissociative electron capture and the tendency of phenyl radical intermediates to cause crosslinking. These structure-property relationships were found to be valid for all the homopolymers and copolymers investigated in this series.