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Phase Measurement Algorithm without Phase unwrapping Problem for Phase stepping interferometry
Authors:WEI Chunlong CHEN Mingyi  HOU Weidong WANG Zhijiang
Institution:WEI Chunlong CHEN Mingyi * HOU Weidong WANG Zhijiang **
Abstract:A new phase measurement algorithm without phase-unwrapping problem is presented. It is mainly applied in the interferograms of few and straight fringes with noise and corrupted regions. Existing phase-unwrapping algorithms for those interferograms are trivial and time consuming. The new algorithm first searches N “seeding pixels” in the interferograms, then the interograms segmented into N parts by the “seeding pixels”. The adjacent “seeding pixels” phase difference is limited in the range of [-π,π]. Because the phase measurement is relative, one can assume that one of the “seeding pixels” phase is a constant, and other “seeding pixels” phases can be easily obtained by the phase-stepping algorithm. Moreover, other pixels phases in the interferograms can be determined through the simple operation with the “seeding pixels” phases by means of the phase-stepping algorithm. A smooth flat mirror was measured in a Linnik interference microscope with phase-stepping interferometry. The interferograms were corrupted with many dirty spots or regions. The experimental results confirm that our new algorithm is fast and robust.
Keywords:phase  stepping algorithm      unwrapping  interferometry
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