Spectroscopy of charged particles elastically scattered by plane-parallel solid layers

The energy spectra of electrons elastically scattered by plane-parallel solid layers are presented. The solid surface is analyzed by a method based on the identification of similar spectra and is called electron Rutherford scattering in analogy with the well-known ion spectroscopy method. The effect of multiple scattering processes on peak intensities in the energy spectra of elastically scattered particles is analyzed. The applicability range of the strong single scattering approximation for the interpretation of the energy spectra of elastically scattered electrons is established.