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| MoSx掺杂DLC薄膜的摩擦磨损行为Ⅰ:载荷的影响 | |
| 引用本文： | 赵飞,逄显娟,杜三明,刘敬超,牛永平,李红轩,张永振.MoSx掺杂DLC薄膜的摩擦磨损行为Ⅰ:载荷的影响[J].摩擦学学报,2012,32(5):516-523. |
| 作者姓名： | 赵飞 逄显娟 杜三明 刘敬超 牛永平 李红轩 张永振 |
| 作者单位： | 1. 河南科技大学材料科学与工程学院,河南洛阳471003 河南省材料摩擦学重点实验室,河南洛阳471003 2. 河南科技大学化工与制药学院,河南洛阳471003 河南省材料摩擦学重点实验室,河南洛阳471003 3. 中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州,730000 |
| 基金项目： | The project was supported by the National Natural Science Foundation of China(U1034002) and the Tribology Science Fund of State Key Laboratory of Tribology (SKLTKF11B10). 国家自然科学基金联合基金(U1034002)和清华大学摩擦学重点实验室开放基金项目(SKLTKF11B10)资助. |
| 摘 要： | 采用射频等离子体增强化学气相沉积与非平衡磁控溅射复合技术制备了MoSx掺杂的DLC薄膜(a-C:H:Mo:S),在QG-700摩擦试验机上考察了其在不同载荷下的摩擦磨损行为.通过对摩擦表面的扫描电镜(SEM)观察及能谱(EDS)分析,简单探讨了其摩擦磨损机理.结果表明:随着载荷的增加,a-C:H:Mo:S/Si3N4体系的摩擦系数及磨损率均呈先降后升的趋势,在高速下尤为明显.初步分析认为该现象与摩擦热效应导致的接触层结构转化相关. |
| 关 键 词： | DLC膜 掺杂 摩擦磨损 载荷 |
Friction and Wear Behaviors of MoSx -doped DLC films I :Effect of Normal Load |
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| ZHAO Fei,PANG Xian-juan,DU San-ming,LIU Jing-chao,NIU Yong-ping,LI Hong-xuan and ZHANG Yong-zhen.Friction and Wear Behaviors of MoSx -doped DLC films I :Effect of Normal Load[J].Tribology,2012,32(5):516-523. | |
| Authors: | ZHAO Fei PANG Xian-juan DU San-ming LIU Jing-chao NIU Yong-ping LI Hong-xuan and ZHANG Yong-zhen |
| Institution: | 1. School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471003,China; 2. Henan Key Laboratory of Materials Tribology, Luoyang 471003, China;1. School of Chemical Engineering and Pharmaceutics, Henan University of Science and Technology, Luoyang 471003,China; 2. Henan Key Laboratory of Materials Tribology, Luoyang 471003, China;1. School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471003,China; 2. Henan Key Laboratory of Materials Tribology, Luoyang 471003, China;1. School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471003,China; 2. Henan Key Laboratory of Materials Tribology, Luoyang 471003, China;1. School of Chemical Engineering and Pharmaceutics, Henan University of Science and Technology, Luoyang 471003,China; 2. Henan Key Laboratory of Materials Tribology, Luoyang 471003, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000,China;1. School of Materials Science and Engineering, Henan University of Science and Technology, Luoyang 471003,China; 2. Henan Key Laboratory of Materials Tribology, Luoyang 471003, China |
| Abstract: | MoSx-doped diamond-like carbon (a-C:H:Mo:S) films were prepared using a hybrid radio frequency plasma-enhanced chemical vapor deposition and unbalanced magnetron sputtering deposition technique. Their friction and wear behaviors under different normal loads were investigated on a QG-700 tribometer and 3D surface profilometer. The friction and wear mechanism was briefly discussed based on the characterizations of frictional surfaces. The results reveal that both the friction coefficient and the wear rate first decrease and then increase with increasing normal load, especially at a higher sliding speed, which is considered to be closely related to the friction-induced heating effect. |
| Keywords: | DLC film doping friction and wear load |
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