Photoelectrochemical properties of TiO x layers prepared by DC pulsed unbalanced reactive magnetron sputtering

Three sets of titanium oxide layers with different oxygen content were prepared by DC pulsed reactive magnetron sputtering. The layers were characterised by their thickness, conductivity, refractive index, band-gap and flat band potential. The photoelectric and photocatalytic activities of the layers irradiated by Xe discharge lamp were tested in NaOH and phenol water solution, respectively. Rather high activity of prepared layers was found; no expressive activity increase was, however, observed in contrary to the expectation connected with suboxide forms of TiO_x.