Correction procedures in electron probe microanalysis of bulk samples

In recent years many of the advances in quantitative microprobe analysis have come from the improved ability to model the complex physics in the computer. This has enabled the accuracy of normal bulk analysis to be improved-right down to the very light elements as far as boron-and has extended the technique to the analysis of multiple thin films and layered samples. It has also allowed the user to shortcut the use of standards, though at the cost of somewhat reduced accuracy. Thus the analyst has come to rely more and more on correction procedures of increasing complexity, yet at the same time must understand their limitations. It is likely that in future the computer itself will be able to accumulate the best practice of expert users, advising the newcomer how these procedures can be best applied and where they are most likely to be in error.