| 飞秒脉冲烧蚀单晶硅的超快动力学 |
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| 引用本文： | 任欢, 王俊波, 邱荣, 等. 飞秒脉冲烧蚀单晶硅的超快动力学[J]. 强激光与粒子束, 2012, 24: 2787-2790. doi: 10.3788/HPLPB20122412.2787 |
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| 作者姓名： | 任欢 王俊波 邱荣 周强 刘浩 马平 |
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| 作者单位： | 1.西南科技大学-中国工程物理研究院激光聚变中心 极端条件物质特性联合实验室, 四川 绵阳 621 01 0;;;2.中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621 900 |
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| 基金项目： | 国家自然科学基金委员会-中国工程物理研究院联合基金项目(10976025); 西南科技大学极端条件物质特性实验室开放基金项目(11zxjk09) |
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| 摘 要： | 利用基于Pump-probe系统的超快时间分辨阴影图的方法，研究了空气中飞秒激光烧蚀单晶硅的动力学过程。实验采用脉宽为50 fs、平均能量密度约35 J/cm2的单脉冲激光烧蚀单晶硅，获取飞秒激光烧蚀单晶硅过程中等离子体和冲击波的形成和发展过程的时间分辨阴影图。实验结果表明：飞秒激光烧蚀单晶硅导致其表面物质喷发的过程是不连续的，分为明显的两次喷发过程。这表明飞秒激光与单晶硅作用的过程中，在不同的时间段可能由不同的机制主导，在前期可能是多光子电离为主，在后期可能是由多光子效应和雪崩效应共同作用。研究还发现，延迟时间较长时，冲击波形状发生畸变。
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| 关 键 词： | 飞秒激光 时间分辨阴影图 烧蚀 冲击波 |
| 收稿时间： | 2012-03-21 |
| 修稿时间： | 2012-07-09 |
Ultrafast dynamics of intense femtosecond laser ablation of silicon |
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| Ren Huan, Wang Junbo, Qiu Rong, et al. Ultrafast dynamics of intense femtosecond laser ablation of silicon[J]. High Power Laser and Particle Beams, 2012, 24: 2787-2790. doi: 10.3788/HPLPB20122412.2787 |
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| Authors: | Ren Huan Wang Junbo Qiu Rong Zhou Qiang Liu Hao Ma Ping |
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| Affiliation: | 1. Joint Laboratory for Extreme Conditions Matter Properties,Southwest University of Science and Technology and Research Center of Laser Fusion,CAEP,Mianyang 621010,China;;;2. Research Center of Laser Fusion,CAEP,P.O.Box 919-988,Mianyang 621900,China |
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| Abstract: | The dynamic process of intense 50 fs laser ablation of silicon is investigated by the way of ultrafast time-resolved shadowgraph. The formation and development processes of plasma and shock wave are recorded, and it is known that the process of material ejection is discontinuous. The process can be divided obviously into two processes, which shows that at different stages there are different mechanism leading the interaction of laser and material. In the shadowgraph of 19 ns time delay, it is found that the shock wave is distorted from the hemispherical shape. |
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| Keywords: | femtosecond laser time-resolved shadowgraphs laser ablation shock wave |
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