| Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si（001） |
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| 引用本文： | 范亚明,张兴旺,游经碧,应杰,谭海仁,陈诺夫.Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si（001）[J].中国物理快报,2009,26(5):187-190. |
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| 作者姓名： | 范亚明 张兴旺 游经碧 应杰 谭海仁 陈诺夫 |
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| 作者单位： | [1]Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy Sciences, Beijing 100083 [2]Key Laboratory of Ferroelectric and Piezoelectric Materials and Devices of Hubei Province, Hubei University, Wuhan 430062 |
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| 基金项目： | Supported by the National Natural Science Foundation of China under Grant No 50601025. |
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| 摘 要： | Cubic boron nitride （c-BN） films were deposited on Si（001） substrates in an ion beam assisted deposition （IBAD） system under various conditions, and the growth parameter spaces and optical properties of c-BN films have been investigated systematically. The results indicate that suitable ion bombardment is necessary for the growth of c-BN films, and a well defined parameter space can be established by using the P/a-parameter. The refractive index of BN films keeps a constant of 1.8 for the c-BN content lower than 50%, while for c-BN films with higher cubic phase the refractive index increases with the c-BN content from 1.8 at χc =50% to 2.1 at χc = 90%. Furthermore, the relationship between n and p for BN films can be described by the Anderson-Schreiber equation, and the overlap field parameter γ is determined to be 2.05.
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| 关 键 词： | 立方氮化硼薄膜 参数空间 光学性质 Si 离子束辅助沉积 BN薄膜 生长 薄膜沉积 |
| 收稿时间： | 2008-10-6 |
Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001) |
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| FAN Ya-Ming,ZHANG Xing-Wang,YOU Jing-Bi,YING Jie,TAN Hai-Ren,CHEN Nuo-Fu.Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)[J].Chinese Physics Letters,2009,26(5):187-190. |
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| Authors: | FAN Ya-Ming ZHANG Xing-Wang YOU Jing-Bi YING Jie TAN Hai-Ren CHEN Nuo-Fu |
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| Institution: | Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy Sciences, Beijing 100083Key Laboratory of Ferroelectric and Piezoelectric Materials and Devices of Hubei Province, Hubei University, Wuhan 430062 |
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| Abstract: | |
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| Keywords: | 68 55 Nq 81 05 Ea 78 66 Fd 81 15 Jj |
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