| 溶胶-凝胶ZrO_2/SiO_2薄膜的激光损伤研究 |
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| 引用本文： | 王毕艺,张晓光,闫秀生,蒋晓东,袁晓东,刘强虎,李建峰,郑万国. 溶胶-凝胶ZrO_2/SiO_2薄膜的激光损伤研究[J]. 光学技术, 2010, 36(2) |
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| 作者姓名： | 王毕艺 张晓光 闫秀生 蒋晓东 袁晓东 刘强虎 李建峰 郑万国 |
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| 作者单位： | 1. 光电系统信息控制技术国家重点实验室,河北,三河,065201
2. 中国工程物理研究院,激光聚变研究中心,四川,绵阳,621900 |
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| 基金项目： | 光电系统信息控制技术国家重点实验室基金(9140C15010209)资助项目 |
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| 摘 要： | 采用溶胶-凝胶工艺分别制备了SiO2和ZrO2单层薄膜、ZrO2/SiO2双层膜以及ZrO2/SiO2多层高反膜。用输出波长为1064nm、脉宽为6.3ns的YAG激光器对薄膜进行了激光损伤实验。观察了薄膜经强激光辐照后的损伤情况,讨论了薄膜的激光损伤行为,并从理论上分析了产生这些损伤的原因,为进一步镀制高质量的ZrO2/SiO2多层高反膜提供了依据。
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| 关 键 词： | 溶胶-凝胶法 激光损伤阈值 损伤形貌 多层高反膜 |
Research of laser damage of ZrO_2/SiO_2 Sol-Gel thin film |
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| WANG Bi-yi,ZHANG Xiao-guang,YAN Xiu-sheng,JIANG Xiao-dong,YUAN Xiao-dong,LIU Qing-hu,LI Jiang-feng,ZHENG Wan-guo. Research of laser damage of ZrO_2/SiO_2 Sol-Gel thin film[J]. Optical Technique, 2010, 36(2) |
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| Authors: | WANG Bi-yi ZHANG Xiao-guang YAN Xiu-sheng JIANG Xiao-dong YUAN Xiao-dong LIU Qing-hu LI Jiang-feng ZHENG Wan-guo |
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| Affiliation: | 1.National Laboratory of Electro-optic System Technology;Sanhe 065201;Hebei;China;2. Research Center of Laser Fusion;CAEP;Mianyang 629100;Sichuan;China |
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| Abstract: | Monolayer SiO2 and ZrO2 thin film,double-layer ZrO2/SiO2 thin film and ZrO2/SiO2 muti-layer high reflectance thin film are prepared by Sol-Gel method.The films are irradiated by a YAG high power laser whose wavelength is 1064nm and its pulse width is 6.3ns.The morphologies of the damage films are observed,the laser damage behavior of thin films is discussed,and the mechanisms of thin film damage are analyzed,these results provide basis for prepared a high quality ZrO2/SiO2 muti-layer high reflectance thin f... |
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| Keywords: | Sol-Gel method laser damage threshold damage morphology muti-layer high reflectance thin film |
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