高功率直流电弧等离子体喷射法制备的金刚石厚膜中黑色缺陷的研究

借助激光标记的方法,对采用高功率直流电弧等离子体喷射法制备的金刚石膜中的黑色缺陷进行了定点表征.结合使用光学显微镜、激光扫描共焦显微镜、扫描电子显微镜、电子背散射衍射技术等多种表征方法,对同一样品的特定微观标记区域进行了多角度的分析.实验结果表明:金刚石膜内部的黑色缺陷是一种存在于晶界处的孔洞与质量较低的金刚石相的复合体,它的形成应与金刚石膜中某些晶界处的生长环境有关.

Research on Dark Features in Diamond Films Produced by DC Arc Plasma Jet Method

Dark features in diamond films prepared by DC arc plasma jet method were investigated by a laser marking process and fixed-point characterization. Optical microscopy, laser confocal scanning microscopy, scanning electron microscopy and electron backscattering diffraction methods were employed to analyze the defects at the same point. The results indicated that the dark features were such a kind of defects that embody pores and poor quality diamond phase located at grain boundaries of diamond films. The formation of the defects is related with the growth environment of the diamond films at specific grain boundaries.